Structure Design and Simulated Optimization of Silicon Resonant Accelerometer

doi:10.3969/j.issn. 1674-5558.2016.01.008

WANG Chao, HU Qi-fang, WANG Yan, ZHANG Ling, ZHUANG Hai-han

Navigation and Control ›› 2016, Vol. 15 ›› Issue (1) : 41-46.

PDF(4711 KB)

Navigation and Control ›› 2016, Vol. 15 ›› Issue (1) : 41-46. DOI: 10.3969/j.issn. 1674-5558.2016.01.008

Structure Design and Simulated Optimization of Silicon Resonant Accelerometer

{{article.zuoZhe_EN}}

Author information +

History +

HeighLight

Abstract

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 15(1): 41-46 https://doi.org/10.3969/j.issn. 1674-5558.2016.01.008

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

Funding

RIGHTS & PERMISSIONS

PDF(4711 KB)

Accesses

Citation

Detail

Sections

Recommended

Please choose a citation manager

Content to export